A study on optimal operation conditions for an electronic device alignment system by using design of experiments

摘要

Purpose: The purpose of this study is to design a systematic method to estimate optimal operation conditions of design variables for an electronic device alignment system.Method: The 2-level factorial design and the central composite design are used in order to plan experiments. Based on the experiment results, a regression model is established to find optimal conditions for the design variables.Results: 3 of 5 design variables are selected as major factors that affect the alignment system significantly. The optimized condition for each variable is estimated by using a sequential experiment plan and a quadratic regression model.Conclusion: The method designed in this study provides an efficient and systematic plan to select the optimized operation condition for the design variables. The method is expected to improve inspection accuracy of the system and reduce the development cost and period.